Alicat Scientific M-100SCCM-D-I/5M Gas: Air Mass Flow Meter *M Series*

Description

Specification
0.025 SCCM to 5000 SLPM available flow measurement range
0.01% to 100% of full scale measurement range
±0.6% of reading accuracy on most flow ranges
± 0.1% of reading + 0.02% of full scale repeatability
−10°C to +60°C Operating Temperature
145 psig max operating procedure
25°C & 1 atm STP default (user selectable)
10 ms measurement response time